Invention Application
- Patent Title: ALIGNMENT MARK, MASK AND DISPLAY SUBSTRATE MOTHERBOARD
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Application No.: US16966874Application Date: 2019-11-29
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Publication No.: US20220373900A1Publication Date: 2022-11-24
- Inventor: Li XIAO , Jiao ZHAO , Dongni LIU , Minghua XUAN , Haoliang ZHENG , Liang CHEN , Hao CHEN , Zhenyu ZHANG , Jing LIU , Qi QI
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- International Application: PCT/CN2019/122047 WO 20191129
- Main IPC: G03F9/00
- IPC: G03F9/00 ; G03F1/42
Abstract:
An alignment mark includes a first alignment marker located on a first surface of a substrate and a second alignment marker located on a second surface of the substrate. The second alignment marker is arranged to be matched with the first alignment marker, and capable of representing a process variation between the second alignment marker and the first alignment marker.
Public/Granted literature
- US11994810B2 Alignment mark, mask and display substrate motherboard Public/Granted day:2024-05-28
Information query
