- 专利标题: THREE-DIMENSIONAL MEMORY DEVICE WITH FINNED SUPPORT PILLAR STRUCTURES AND METHODS FOR FORMING THE SAME
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申请号: US17328302申请日: 2021-05-24
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公开(公告)号: US20220375958A1公开(公告)日: 2022-11-24
- 发明人: Seiji SHIMABUKURO , Takashi YAMAHA
- 申请人: SANDISK TECHNOLOGIES LLC
- 申请人地址: US TX Addison
- 专利权人: SANDISK TECHNOLOGIES LLC
- 当前专利权人: SANDISK TECHNOLOGIES LLC
- 当前专利权人地址: US TX Addison
- 主分类号: H01L27/11575
- IPC分类号: H01L27/11575 ; H01L27/11519 ; H01L27/11548 ; H01L27/11556 ; H01L27/11565 ; H01L27/11582 ; H01L27/11587 ; H01L27/11595 ; H01L27/11597 ; H01L21/768
摘要:
A three-dimensional memory device includes an alternating stack of insulating layers and electrically conductive layers located over a substrate, memory openings vertically extending through a first region of the alternating stack, memory opening fill structures located in the memory openings, and support pillar structures vertically extending through a second region of the alternating stack. Each of the support pillar structures includes a central columnar structure and a set of fins laterally protruding from the central columnar structure at levels of a subset of the electrically conductive layers.
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