Invention Application
- Patent Title: SUBSTRATE TREATING APPARATUS
-
Application No.: US17825275Application Date: 2022-05-26
-
Publication No.: US20220381509A1Publication Date: 2022-12-01
- Inventor: Yong Joon IM , Sang Min LEE , Jong Doo LEE , Jin Se PARK
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Chungcheongnam-do
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Chungcheongnam-do
- Priority: KR10-2021-0070010 20210531
- Main IPC: F26B5/00
- IPC: F26B5/00

Abstract:
The present invention provides a substrate treating apparatus, including: a housing including a first body and a second body which are combined with each other to provide a treatment space in which a substrate is treated; an actuator which moves the second body in a vertical direction with respect to the first body to seal or open the treatment space; and a pipe which is coupled with the second body and in which a fluid flows, in which the pipe is a stretchable pipe that is stretchable and contractible according to the vertical movement of the second body.
Information query
IPC分类: