Invention Application
- Patent Title: METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR DEVICE
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Application No.: US17886609Application Date: 2022-08-12
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Publication No.: US20220384641A1Publication Date: 2022-12-01
- Inventor: Huajun JIN , Guipeng SUN , Feng LIN , Shuxian CHEN
- Applicant: CSMC TECHNOLOGIES FAB2 CO., LTD.
- Applicant Address: CN Jiangsu
- Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
- Current Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
- Current Assignee Address: CN Jiangsu
- Priority: JP202010698017.4 20200720
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/10 ; H01L29/06 ; H01L29/66 ; H01L21/266

Abstract:
A method for manufacturing a semiconductor device, and a semiconductor device. The method includes: providing a semiconductor substrate of a first conductivity type, forming a deep well of a second conductivity type in the semiconductor substrate, forming a channel region of the first conductivity type, a first well region of the first conductivity type, and a drift region of the second conductivity type in the deep well, the first well region and the channel region being spaced by a portion of the deep well, the drift region being located between the channel region and the first well region, forming an ion implantation region of the first conductivity type in the deep well, the ion implantation region being located under the drift region, and forming a source region of the second conductivity type and a drain region of the second conductivity type in the deep well.
Information query
IPC分类: