- 专利标题: METHOD AND SYSTEM FOR DETERMINING SAMPLE COMPOSITION FROM SPECTRAL DATA
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申请号: US17365832申请日: 2021-07-01
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公开(公告)号: US20230003675A1公开(公告)日: 2023-01-05
- 发明人: Oleksii KAPLENKO , Jan KLUSCÁEK , Tomás TÛMA , Mykola KAPLENKO , Ondrej MACHEK
- 申请人: FEI Company
- 申请人地址: US OR Hillsboro
- 专利权人: FEI Company
- 当前专利权人: FEI Company
- 当前专利权人地址: US OR Hillsboro
- 主分类号: G01N23/2252
- IPC分类号: G01N23/2252 ; G01N23/20 ; G01N23/203 ; G01N23/04 ; G01N23/083 ; G06N3/02
摘要:
Method and system are disclosed for determining sample composition from spectral data acquired by a charged particle microscopy system. Chemical elements in a sample are identified by processing the spectral data with a trained neural network (NN). If the identified chemical elements not matching with a known elemental composition of the sample, the trained NN is retrained with the spectral data and the known elemental composition of the sample. The retrained NN can then be used to identify chemical elements within other samples.
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