- 专利标题: Semiconductor Substrate Manufacturing Method and Semiconductor Substrate
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申请号: US17782035申请日: 2021-05-27
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公开(公告)号: US20230006070A1公开(公告)日: 2023-01-05
- 发明人: Jie Huang , Ce Ning , Zhengliang Li , Hehe Hu , Jiayu He , Nianqi Yao , Kun Zhao , Feng Qu , Xiaochun Xu
- 申请人: BOE Technology Group Co., Ltd.
- 申请人地址: CN Beijing
- 专利权人: BOE Technology Group Co., Ltd.
- 当前专利权人: BOE Technology Group Co., Ltd.
- 当前专利权人地址: CN Beijing
- 优先权: CN202010591840.5 20200624
- 国际申请: PCT/CN2021/096474 WO 20210527
- 主分类号: H01L29/786
- IPC分类号: H01L29/786 ; H01L29/66 ; H01L27/12
摘要:
A semiconductor substrate manufacturing method and a semiconductor substrate. The manufacturing method includes: forming a first semiconductor layer on the base substrate at a first temperature with a first oxide semiconductor material; forming the second semiconductor layer directly on the first semiconductor layer with a second oxide semiconductor material; and performing a patterning process such that the first semiconductor layer and the second semiconductor layer are respectively patterned into a seed layer and a first channel layer. Both the first oxide semiconductor material and the second oxide semiconductor material are capable of forming crystalline phases at a second temperature, the second temperature is less than or equal to 40° C., and the first temperature is greater than or equal to 100° C.
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