Invention Application
- Patent Title: Semiconductor Substrate Manufacturing Method and Semiconductor Substrate
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Application No.: US17782035Application Date: 2021-05-27
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Publication No.: US20230006070A1Publication Date: 2023-01-05
- Inventor: Jie Huang , Ce Ning , Zhengliang Li , Hehe Hu , Jiayu He , Nianqi Yao , Kun Zhao , Feng Qu , Xiaochun Xu
- Applicant: BOE Technology Group Co., Ltd.
- Applicant Address: CN Beijing
- Assignee: BOE Technology Group Co., Ltd.
- Current Assignee: BOE Technology Group Co., Ltd.
- Current Assignee Address: CN Beijing
- Priority: CN202010591840.5 20200624
- International Application: PCT/CN2021/096474 WO 20210527
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L29/66 ; H01L27/12

Abstract:
A semiconductor substrate manufacturing method and a semiconductor substrate. The manufacturing method includes: forming a first semiconductor layer on the base substrate at a first temperature with a first oxide semiconductor material; forming the second semiconductor layer directly on the first semiconductor layer with a second oxide semiconductor material; and performing a patterning process such that the first semiconductor layer and the second semiconductor layer are respectively patterned into a seed layer and a first channel layer. Both the first oxide semiconductor material and the second oxide semiconductor material are capable of forming crystalline phases at a second temperature, the second temperature is less than or equal to 40° C., and the first temperature is greater than or equal to 100° C.
Information query
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