Invention Publication
- Patent Title: ETCHING OF MAGNETIC TUNNEL JUNCTION (MTJ) STACK FOR MAGNETORESISTIVE RANDOM-ACCESS MEMORY (MRAM)
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Application No.: US17520672Application Date: 2021-11-07
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Publication No.: US20230144157A1Publication Date: 2023-05-11
- Inventor: Koichi Motoyama , Oscar van der Straten , Joseph F. Maniscalco , Chih-Chao Yang
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Main IPC: H01L43/12
- IPC: H01L43/12 ; H01L27/22 ; H01L43/02

Abstract:
Embodiments of the invention include a method for fabricating a semiconductor device and the resulting structure. A first set of spacers are formed on the sidewalls of a bottom electrode. A reference layer is formed on the spacers and the bottom electrode. A second set of spacers are formed on the sidewalls of the first set of spacers and the reference layer. A tunnel barrier is formed on the reference layer and the second set of spacers. A free layer is formed on the tunnel barrier, where a width of the free layer is greater than a width of the reference layer. A metal hardmask is formed on the free layer. A third set of spacers are formed on the sidewalls of the metal hardmask, the free layer, the tunnel barrier, and the second set of spacers.
Information query
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