Invention Publication
- Patent Title: 3DIC STRUCTURE AND METHODS OF FORMING
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Application No.: US18156848Application Date: 2023-01-19
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Publication No.: US20230154898A1Publication Date: 2023-05-18
- Inventor: Kuo-Ming Wu , Yung-Lung Lin , Zhi-Yang Wang , Sheng-Chau Chen , Cheng-Hsien Chou
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- The original application number of the division: US15054402 2016.02.26
- Main IPC: H01L25/065
- IPC: H01L25/065 ; H01L25/00 ; H01L23/00

Abstract:
A structure and a method of forming are provided. The structure includes a first dielectric layer overlying a first substrate. A first connection pad is disposed in a top surface of the first dielectric layer and contacts a first redistribution line. A first dummy pad is disposed in the top surface of the first dielectric layer, the first dummy pad contacting the first redistribution line. A second dielectric layer overlies a second substrate. A second connection pad and a second dummy pad are disposed in the top surface of the second dielectric layer, the second connection pad bonded to the first connection pad, and the first dummy pad positioned in a manner that is offset from the second dummy pad so that the first dummy pad and the second dummy pad do not contact each other.
Public/Granted literature
- US11984431B2 3DIC structure and methods of forming Public/Granted day:2024-05-14
Information query
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