Invention Publication
- Patent Title: ETCHANT COMPOSITION FOR INDIUM OXIDE FILM OR SILVER-CONTAINING METAL FILM AND METHOD FOR PREPARING THE SAME
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Application No.: US17994173Application Date: 2022-11-25
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Publication No.: US20230167360A1Publication Date: 2023-06-01
- Inventor: Hyoungsik Kim , Jonghee Park , Sehoon Kim , Boyeon Lee , Yangryeong Kim , Seokil Jung , Ikjoon Kim , Sangseung Park , Wonho Noh , Mingyeong Jeong
- Applicant: Samsung Display Co., Ltd. , ENF TECHNOLOGY CO., LTD.
- Applicant Address: KR Yongin-si, Gyeonggi-do
- Assignee: Samsung Display Co., Ltd.,ENF TECHNOLOGY CO., LTD.
- Current Assignee: Samsung Display Co., Ltd.,ENF TECHNOLOGY CO., LTD.
- Current Assignee Address: KR Yongin-si, Gyeonggi-do
- Priority: KR 20210166194 2021.11.26
- Main IPC: C09K13/06
- IPC: C09K13/06 ; C23F1/30 ; C23F1/16

Abstract:
An etchant composition is disclosed that provides selective etching of an indium oxide film or a sliver-containing metal layer. The etchant composition includes nitric acid, an organic acid, a sulfur compound, and a tin compound. The organic acid does not include the elements of sulfur and tin. The sulfur compound does not include the element of tin. The etchant composition may minimize the damage of a lower metal film and may exhibit excellent etching characteristics in terms of etching rate, bias, residue, precipitation, and etching uniformity.
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