IC structures including BPRs used for ESD ballasting are disclosed. An IC structure includes semiconductor structures of one or more transistors. A semiconductor structure may be a fin, nanowire, or nanoribbon of a semiconductor material. The IC structure also includes an electrically conductive layer coupled to the semiconductor structures, a power rail, and a support structure. The power rail is coupled to the electrically conductive layer by a via. The power rail is buried in a support structure. The combination of the power rail and the via constitutes a ESD ballasting resistor for the semiconductor structures. A resistance of the ESD ballasting resistor can be in a range from 5 to 20 ohms. The IC structure may include two or more power rails. A power rail may be arranged between two of the semiconductor structures. The power rails may form a meander structure with other components of the IC structure.