Invention Publication
- Patent Title: FIELD-EFFECT TRANSISTOR DEVICE
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Application No.: US18060954Application Date: 2022-12-01
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Publication No.: US20230178640A1Publication Date: 2023-06-08
- Inventor: Aryan Afzalian , Julien Ryckaert , Naoto Horiguchi
- Applicant: IMEC VZW
- Applicant Address: BE Leuven
- Assignee: IMEC VZW
- Current Assignee: IMEC VZW
- Current Assignee Address: BE Leuven
- Priority: EP 212147.9 2021.12.03
- Main IPC: H01L29/775
- IPC: H01L29/775 ; H01L27/092 ; H01L29/06 ; H01L29/08 ; H01L29/423 ; H01L21/8238 ; H01L29/66

Abstract:
A FET device (100) is provided, the FET device including a substrate (102), a source body (120), a drain body (130) and a set of vertically spaced apart channel layers (150) extending between the source and drain body in a first direction along the substrate (102), the source body (120) comprising a common source body portion (122) arranged at a first lateral side of the set of channel layers (150) and a set of vertically spaced apart source prongs (124) protruding from the common source body portion (122) in a second direction along the substrate (102), transverse to the first direction, the drain body (130) comprising a common source body portion (132) arranged at the first lateral side of the set of channel layers (150) and a set of drain prongs (134) protruding from the common drain body portion (132) in the second direction; and a gate body (140) comprising a common gate body portion (142) arranged at a second lateral side of the channel layer (150), opposite the first lateral side, and a set of gate prongs (144) protruding from the common gate body gate portion (142) in a third direction along the substrate (102), opposite the first direction; wherein each channel layer (150) comprises a first side (150aa, 150ba) and an opposite second side (150ab, 150bb), the first side arranged in abutment with a topside or an underside of a pair of source and drain prongs (124a, 134a) and the second side (150ab, 150bb) facing a gate prong (144a, 144b).
Information query
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