Invention Publication
- Patent Title: SEMICONDUCTOR MEMORY DEVICE
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Application No.: US17956102Application Date: 2022-09-29
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Publication No.: US20230180452A1Publication Date: 2023-06-08
- Inventor: Kiseok LEE , Taegyu KANG , Keunnam KIM , Sung-Min PARK , Taehyun AN , Sanghyun LEE , Eunsuk JANG , Moonyoung JEONG , Euichul JEONG , Hyungeun CHOI
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Priority: KR 20210174178 2021.12.07
- Main IPC: H01L27/108
- IPC: H01L27/108 ; G11C5/04 ; G11C7/18 ; G11C8/14

Abstract:
A semiconductor memory device includes a word line extended parallel to a top surface of a semiconductor substrate, a channel pattern crossing the word line and having a long axis parallel to the top surface, a bit line extended perpendicular to the top surface and in contact with a first side surface of the channel pattern, and a data storage element in contact with a second side surface of the channel pattern opposite to the first side surface. The channel pattern includes a first dopant region adjacent to the bit line, a second dopant region adjacent to the data storage element, and a channel region between the first and second dopant regions and overlapped with the word line. At least one of the first and second dopant regions includes a low concentration region adjacent to the channel region, and a high concentration region spaced apart from the channel region.
Information query
IPC分类: