SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME

    公开(公告)号:US20240365535A1

    公开(公告)日:2024-10-31

    申请号:US18397014

    申请日:2023-12-27

    CPC classification number: H10B12/488 H10B12/315 H10B12/482 H10B12/485

    Abstract: A semiconductor device includes a first active pattern including a first edge portion and a second edge portion, which are spaced apart from each other in a first direction; a first word line between the first edge portion of the first active pattern and the second edge portion of the first active pattern and extending in a second direction that crosses the first direction; a bit line on the first edge portion of the first active pattern and extending in a third direction that crosses the first direction and the second direction; and a storage node contact on the second edge portion of the first active pattern, wherein a top surface of the first edge portion is at a level higher than a top surface of the second edge portion.

    SEMICONDUCTOR DEVICES
    2.
    发明公开

    公开(公告)号:US20240315005A1

    公开(公告)日:2024-09-19

    申请号:US18388266

    申请日:2023-11-09

    CPC classification number: H10B12/315 H10B12/0335 H10B12/482

    Abstract: A semiconductor device includes an active pattern array including active patterns on a substrate; a first contact structure on a central portion of each active pattern; a bit line structure on the first contact structure; a second contact structure on an end of each active pattern; a third contact structure on the second contact structure; and a capacitor electrically connected to the third contact structure, wherein the active pattern array includes active pattern rows spaced apart from each other in a second direction parallel the substrate, the active pattern rows include active patterns spaced apart from each other in a first direction parallel to the substrate, the active patterns extend in a third direction having an acute angle with the first/second directions, the active patterns in the rows are aligned in the first direction, and the second contact structure has a rectangular shape in a plan view.

    SEMICONDUCTOR MEMORY DEVICES
    5.
    发明公开

    公开(公告)号:US20230180456A1

    公开(公告)日:2023-06-08

    申请号:US18059492

    申请日:2022-11-29

    Abstract: A semiconductor memory device including a transistor body extending in a first horizontal direction and including a first source/drain region, a single-crystal channel layer, and a second source/drain region sequentially arranged in the first horizontal direction, a gate electrode layer extending in a second horizontal direction orthogonal to the first horizontal direction and covering upper and lower surfaces of the single-crystal channel layer, a bit line connected to the first source/drain region, extending in a vertical direction, and having a first width in the second horizontal direction, a spacer covering upper and lower surfaces of the first source/drain region and having a second width greater than the first width, and a cell capacitor on a side opposite to the bit line with respect to the transistor body in the first horizontal direction and including lower and upper electrode layers and a capacitor dielectric layer therebetween may be provided.

    SEMICONDUCTOR MEMORY DEVICE
    6.
    发明申请

    公开(公告)号:US20230055499A1

    公开(公告)日:2023-02-23

    申请号:US17805706

    申请日:2022-06-07

    Abstract: A semiconductor memory device may be provided. The semiconductor memory device may include a bit line, a channel pattern on the bit line, the channel pattern including a horizontal channel portion, which is provided on the bit line, and a vertical channel portion, which is vertically extended from the horizontal channel portion, a word line provided on the channel pattern to cross the bit line, the word line including a horizontal portion, which is provided on the horizontal channel portion, and a vertical portion, which is vertically extended from the horizontal portion to face the vertical channel portion, and a gate insulating pattern provided between the channel pattern and the word line.

    SEMICONDUCTOR MEMORY DEVICE
    7.
    发明申请

    公开(公告)号:US20230044856A1

    公开(公告)日:2023-02-09

    申请号:US17873242

    申请日:2022-07-26

    Abstract: A semiconductor memory device including a substrate including an active pattern that includes a first source/drain region and a second source/drain region; an insulating layer on the substrate; a line structure on the insulating layer and extending in a first direction to cross the active pattern, the line structure penetrating the insulating layer on the first source/drain region and including a bit line electrically connected to the first source/drain region; and a contact spaced apart from the line structure and electrically connected to the second source/drain region, wherein the bit line includes a first portion vertically overlapped with the first source/drain region; and a second portion vertically overlapped with the insulating layer, and wherein a lowermost level of a top surface of the first portion of the bit line is at a level lower than a lowermost level of a top surface of the second portion of the bit line.

    SEMICONDUCTOR MEMORY DEVICE
    8.
    发明申请

    公开(公告)号:US20220102352A1

    公开(公告)日:2022-03-31

    申请号:US17241860

    申请日:2021-04-27

    Abstract: A semiconductor memory device includes a bit line extending in a first direction, a channel pattern on the bit line, the channel pattern including first and second vertical portions facing each other and a horizontal portion connecting the first and second vertical portions, first and second word lines provided on the horizontal portion and between the first and second vertical portions and extended in a second direction crossing the bit line, and a gate insulating pattern provided between the first word line and the channel pattern and between the second word line and the channel pattern.

    SEMICONDUCTOR MEMORY DEVICE
    9.
    发明申请

    公开(公告)号:US20210408008A1

    公开(公告)日:2021-12-30

    申请号:US17471824

    申请日:2021-09-10

    Abstract: A method of manufacturing a semiconductor memory device and a semiconductor memory device, the method including providing a substrate that includes a cell array region and a peripheral circuit region; forming a mask pattern that covers the cell array region and exposes the peripheral circuit region; growing a semiconductor layer on the peripheral circuit region exposed by the mask pattern such that the semiconductor layer has a different lattice constant from the substrate; forming a buffer layer that covers the cell array region and exposes the semiconductor layer; forming a conductive layer that covers the buffer layer and the semiconductor layer; and patterning the conductive layer to form conductive lines on the cell array region and to form a gate electrode on the peripheral circuit region.

    SEMICONDUCTOR MEMORY DEVICES
    10.
    发明申请

    公开(公告)号:US20210057416A1

    公开(公告)日:2021-02-25

    申请号:US17090419

    申请日:2020-11-05

    Abstract: Semiconductor memory devices are provided. A semiconductor memory device includes a substrate. The semiconductor memory device includes a plurality of memory cell transistors vertically stacked on the substrate. The semiconductor memory device includes a first conductive line connected to a source region of at least one of the plurality of memory cell transistors. The semiconductor memory device includes a second conductive line connected to a plurality of gate electrodes of the plurality of memory cell transistors. Moreover, the semiconductor memory device includes a data storage element connected to a drain region of the at least one of the plurality of memory cell transistors.

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