Invention Publication
- Patent Title: Gas Distribution Apparatuses
-
Application No.: US18065742Application Date: 2022-12-14
-
Publication No.: US20230193463A1Publication Date: 2023-06-22
- Inventor: Shashidhara Patel H B , Madhuri Kalva , Sreenivasa Rao Nunna , Shih Chung Chen , Yongjing Lin , Bin Cao
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: C23C16/455
- IPC: C23C16/455 ; H01J37/32

Abstract:
Gas distribution apparatuses, e.g., showerheads, comprise passages having a first conical bore section, a small bore section, and a second conical bore section. The first conical bore sections comprise a first non-perpendicular wall angle relative to a back surface of a faceplate. The second conical bore sections comprise a second non-perpendicular angle to a front surface of the faceplate. The conical sections including non-perpendicular angles are effective to mitigate and/or eliminate changes in flow parameters through the passages after bead blast processes.
Information query
IPC分类: