公开(公告)号：US20230193463A1

公开(公告)日：2023-06-22

申请号：US18065742

申请日：2022-12-14

Applicant: Applied Materials, Inc.

Inventor： Shashidhara Patel H B ,  Madhuri Kalva ,  Sreenivasa Rao Nunna ,  Shih Chung Chen ,  Yongjing Lin ,  Bin Cao

IPC: C23C16/455 ,  H01J37/32

CPC classification number: C23C16/45565 ,  H01J37/32458 ,  H01J37/32449 ,  C23C16/45544

Abstract: Gas distribution apparatuses, e.g., showerheads, comprise passages having a first conical bore section, a small bore section, and a second conical bore section. The first conical bore sections comprise a first non-perpendicular wall angle relative to a back surface of a faceplate. The second conical bore sections comprise a second non-perpendicular angle to a front surface of the faceplate. The conical sections including non-perpendicular angles are effective to mitigate and/or eliminate changes in flow parameters through the passages after bead blast processes.