发明公开
- 专利标题: PLASMA PROCESSING APPARATUS
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申请号: US18156618申请日: 2023-01-19
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公开(公告)号: US20230238217A1公开(公告)日: 2023-07-27
- 发明人: Koji KOTANI , Eiki KAMATA , Taro IKEDA
- 申请人: Tokyo Electron Limited
- 申请人地址: JP Tokyo
- 专利权人: Tokyo Electron Limited
- 当前专利权人: Tokyo Electron Limited
- 当前专利权人地址: JP Tokyo
- 优先权: JP 22008793 2022.01.24
- 主分类号: H01J37/32
- IPC分类号: H01J37/32
摘要:
A plasma processing apparatus includes: a processing container; a ceiling plate that constitutes a ceiling wall of the processing container, is formed of a first dielectric, and has an opening formed in the first dielectric; at least one transmissive window disposed in the opening and formed of a second dielectric having a second permittivity greater than a first permittivity of the first dielectric; and at least one electromagnetic wave supplier configured to supply electromagnetic waves toward the at least one transmissive window.
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