- 专利标题: METHOD FOR ASSESSING THE STATE OF A SENSOR AS WELL AS SENSOR SYSTEM AND METHOD FOR OPERATING THE SENSOR SYSTEM
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申请号: US18040185申请日: 2021-07-15
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公开(公告)号: US20230273236A1公开(公告)日: 2023-08-31
- 发明人: Joachim Kreutzer , David Slogsnat , Gabriele Cazzaniga , Massimiliano Musazzi , Timon Brueckner
- 申请人: Robert Bosch GmbH
- 申请人地址: DE Stuttgart
- 专利权人: Robert Bosch GmbH
- 当前专利权人: Robert Bosch GmbH
- 当前专利权人地址: DE Stuttgart
- 优先权: DE 2020209856.5 2020.08.05
- 国际申请: PCT/EP2021/069731 2021.07.15
- 进入国家日期: 2023-02-01
- 主分类号: G01P15/125
- IPC分类号: G01P15/125 ; G01P1/00
摘要:
A method for assessing the state of a sensor. The sensor comprises a deflectable micromechanical sensor structure for detecting a physical input variable and converting the physical input variable into an electrical sensor signal. A medium surrounding the sensor acts on the micromechanical sensor structure. The micromechanical sensor structure is deflectable using an excitation signal. The method includes: generating an excitation signal using a driver unit; outputting the excitation signal to the micromechanical sensor structure; deflecting the micromechanical sensor structure using the excitation signal; detecting a response behavior of the micromechanical sensor structure in response to the excitation signal; comparing the response behavior to a reference behavior to determine a measure of deviation for the response behavior in relation to the reference behavior; and assessing, based on the measure of deviation, the state of the sensor with respect to the presence of a deposit.
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