METHOD FOR ASSESSING THE STATE OF A SENSOR AS WELL AS SENSOR SYSTEM AND METHOD FOR OPERATING THE SENSOR SYSTEM

    公开(公告)号:US20230273236A1

    公开(公告)日:2023-08-31

    申请号:US18040185

    申请日:2021-07-15

    CPC classification number: G01P15/125 G01P1/00

    Abstract: A method for assessing the state of a sensor. The sensor comprises a deflectable micromechanical sensor structure for detecting a physical input variable and converting the physical input variable into an electrical sensor signal. A medium surrounding the sensor acts on the micromechanical sensor structure. The micromechanical sensor structure is deflectable using an excitation signal. The method includes: generating an excitation signal using a driver unit; outputting the excitation signal to the micromechanical sensor structure; deflecting the micromechanical sensor structure using the excitation signal; detecting a response behavior of the micromechanical sensor structure in response to the excitation signal; comparing the response behavior to a reference behavior to determine a measure of deviation for the response behavior in relation to the reference behavior; and assessing, based on the measure of deviation, the state of the sensor with respect to the presence of a deposit.

    Sensor device for measuring a fluid concentration, and use of the sensor device

    公开(公告)号:US10914675B2

    公开(公告)日:2021-02-09

    申请号:US15740477

    申请日:2016-05-25

    Abstract: A sensor apparatus having a sensor unit. The sensor unit including pixel assemblages on a substrate upper side of a substrate located on a lower side of the sensor unit; a cap, on the substrate upper side, which covers the pixel assemblages, a cavity being formed between the substrate upper side and the cap; a plurality of filters that are transparent to wavelength regions that differ from one another, exactly one pixel assemblage being associated with each filter; and the filters being on the cap so that the infrared radiation propagated through an absorption gap of the sensor apparatus and the upper side of the sensor unit is detectable, through the respective filter, by the pixel assemblage associated with the respective filter; and a coating made of a light-absorbing and/or light-reflecting material being configured at least locally on a part of the cap which is not covered by the filters.

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