- 专利标题: SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
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申请号: US18209482申请日: 2023-06-14
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公开(公告)号: US20230329004A1公开(公告)日: 2023-10-12
- 发明人: Da-Jun Lin , Yi-An Shih , Bin-Siang Tsai , Fu-Yu Tsai
- 申请人: UNITED MICROELECTRONICS CORP.
- 申请人地址: TW Hsin-Chu City
- 专利权人: UNITED MICROELECTRONICS CORP.
- 当前专利权人: UNITED MICROELECTRONICS CORP.
- 当前专利权人地址: TW Hsin-Chu City
- 优先权: CN 2011203268.7 2020.11.02
- 主分类号: H10B61/00
- IPC分类号: H10B61/00 ; H10N50/01 ; H10N50/80
摘要:
A method for fabricating a semiconductor device includes the steps of first forming a magnetic tunneling junction (MTJ) on a substrate, forming a top electrode on the MTJ, forming an inter-metal dielectric (IMD) layer around the top electrode and the MTJ, forming a landing layer on the IMD layer and the MTJ, and then patterning the landing layer to form a landing pad. Preferably, the landing pad is disposed on the top electrode and the IMD layer adjacent to one side of the top electrode.
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