Invention Publication
- Patent Title: Fabrication of a Polishing Pad for Chemical Mechanical Polishing
-
Application No.: US18349491Application Date: 2023-07-10
-
Publication No.: US20230347471A1Publication Date: 2023-11-02
- Inventor: An-Hsuan Lee , Ming-Shiuan She , Chen-Hao Wu , Chun-Hung Liao , Shen-Nan Lee , Teng-Chun Tsai
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- The original application number of the division: US16454402 2019.06.27
- Main IPC: B24B37/24
- IPC: B24B37/24 ; C09G1/02 ; B24B37/10 ; B32B3/12 ; B32B3/10 ; C08J9/26

Abstract:
A method disclosed herein includes forming a polishing pad configured for a chemical-mechanical polishing (CMP) process and polishing a workpiece using the polishing pad and a CMP slurry. Forming the polishing pad includes forming an interpenetrating polymer network having a first phase and a second phase embedded in the first phase, removing the second phase from the interpenetrating polymer network, thereby forming a porous top pad that includes a network of pores embedded in the first phase, and adhering the porous top pad to a sub pad, thereby forming the polishing pad. The second phase is different from the first phase in composition, and the interpenetrating polymer network has a substantially periodic pattern. Surface roughness of the porous top pad is consistent during the polishing of the workpiece.
Information query