发明公开
- 专利标题: 3D SEMICONDUCTOR DEVICES AND STRUCTURES WITH AT LEAST TWO SINGLE-CRYSTAL LAYERS
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申请号: US17945671申请日: 2022-09-15
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公开(公告)号: US20230352333A1公开(公告)日: 2023-11-02
- 发明人: Zvi Or-Bach , Brian Cronquist , Deepak C. Sekar
- 申请人: Monolithic 3D Inc.
- 申请人地址: US OR Klamath Falls
- 专利权人: Monolithic 3D Inc.
- 当前专利权人: Monolithic 3D Inc.
- 当前专利权人地址: US OR Klamath Falls
- 主分类号: H01L21/683
- IPC分类号: H01L21/683 ; H01L21/74 ; H01L21/762 ; H01L21/768 ; H01L21/822 ; H01L21/8238 ; H01L21/84 ; H01L23/48 ; H01L23/525 ; H01L27/02 ; H01L27/06 ; H01L27/092 ; H01L27/10 ; H01L27/105 ; H01L27/118 ; H01L27/12 ; H01L29/423 ; H01L29/66 ; H01L29/78 ; H01L29/788 ; H01L29/792 ; G11C8/16 ; H10B10/00 ; H10B12/00 ; H10B20/00 ; H10B41/20 ; H10B41/40 ; H10B41/41 ; H10B43/20 ; H10B43/40
摘要:
A 3D semiconductor device, the device including: a first level including a first single crystal layer, the first level including first transistors, where the first transistors each include a single crystal channel; first metal layers interconnecting at least the first transistors; and a second level including a second single crystal layer, the second level including second transistors, where a top surface of the first level includes a first oxide region and a bottom surface of the second level includes a second oxide region, where the second level overlays the first level, where the second level is bonded to the first level, where the bonded includes oxide to oxide bonds, and where the second transistors are raised source drain extension transistors.
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