Invention Publication
- Patent Title: METHOD AND STRUCTURE FOR A LOGIC DEVICE AND ANOTHER DEVICE
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Application No.: US17663676Application Date: 2022-05-17
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Publication No.: US20230378258A1Publication Date: 2023-11-23
- Inventor: Ruilong Xie , Anthony I. Chou , Brent A. Anderson , John Christopher Arnold , Junli Wang , Kai Zhao , Terence Hook , Julien Frougier , Xuefeng Liu
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY ARMONK
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY ARMONK
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L21/768 ; H01L21/02 ; H01L21/74

Abstract:
A method including forming an oxide layer on a first substrate and forming a second substrate on the oxide layer. Doping a first section of the second substrate while not doping a second section of the second substrate. Forming a first nano device on the second section of the second substrate and forming a second nano device on first section of the second substrate. Flipping the first substrate over to allow for backside processing of the substrate and forming at least one backside contact connected to the first nano device while backside contacts are not formed or connected to the second nano device.
Information query
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