- 专利标题: SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME
-
申请号: US17832681申请日: 2022-06-05
-
公开(公告)号: US20230395655A1公开(公告)日: 2023-12-07
- 发明人: Shih-Cheng Chen , Zhi-Chang Lin , Jung-Hung Chang , Chien-Ning Yao , Tsung-Han Chuang , Kuo-Cheng Chiang , Chih-Hao Wang
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 主分类号: H01L29/06
- IPC分类号: H01L29/06 ; H01L29/417 ; H01L29/423 ; H01L29/786 ; H01L21/02 ; H01L21/311 ; H01L29/66
摘要:
Provided are a semiconductor device and a method of forming the same. The semiconductor device includes at least two active strip regions, a hybrid fin structure, and a gate stack. The hybrid fin structure is disposed between the at least two active strip regions. The gate stack is across the at least two active strip regions and the hybrid fin structure. A portion of the hybrid fin structure exposed by the gate stack is free of a high dielectric constant material.
信息查询
IPC分类: