- 专利标题: ORGANIC ADHESION PROMOTOR FOR DIELECTRIC ADHESION TO A COPPER TRACE
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申请号: US17848615申请日: 2022-06-24
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公开(公告)号: US20230420322A1公开(公告)日: 2023-12-28
- 发明人: Yi YANG , Srinivas V. PIETAMBARAM , Suddhasattwa NAD , Darko GRUJICIC , Marcel WALL
- 申请人: Intel Corporation
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 主分类号: H01L23/31
- IPC分类号: H01L23/31 ; H01L23/498 ; H01L23/495
摘要:
Embodiments herein relate to systems, apparatuses, or processes directed to an organic adhesion promoter layer on the surface of a copper trace to reduce delamination between a dielectric material and the surface of the copper trace, and to facilitate a smooth surface interface between the surface of the copper trace and of a copper feature, such as a copper-filled via, placed on the surface of the copper trace. The smooth surface interface reduces insertion loss and enables routing of higher frequency signals on a package, and does not require roughing of the copper trace in order to adhere to the dielectric material. Other embodiments may be described and/or claimed.
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