Invention Application
- Patent Title: POINT-OF-USE ULTRASONIC HOMOGENIZER FOR CMP SLURRY AGGLOMERATION REDUCTION
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Application No.: US17405898Application Date: 2021-08-18
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Publication No.: US20230054165A1Publication Date: 2023-02-23
- Inventor: Chih Chung Chou , Haosheng Wu , Jianshe Tang , Shou-Sung Chang , Brian J. Brown , Chad Pollard , Hari N. Soundararajan
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: B24B37/34
- IPC: B24B37/34 ; H01L21/306 ; H01L21/66 ; B06B1/06 ; B01F11/02 ; B01F15/06
Abstract:
Exemplary slurry delivery assemblies may include a slurry fluid source. The assemblies may include a flurry delivery lumen having a lumen inlet and a lumen outlet. The lumen inlet may be fluidly coupled with an output of the slurry fluid source. The assemblies may include a deagglomeration tube fluidly coupled with the lumen outlet. The deagglomeration tube may include a tube inlet and a tube outlet. The assemblies may include one or more ultrasonic transducers coupled with the deagglomeration tube.
Information query
