- 专利标题: ELECTRONIC DEVICE INCLUDING FERROELECTRIC THIN FILM STRUCTURE
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申请号: US17876979申请日: 2022-07-29
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公开(公告)号: US20230068904A1公开(公告)日: 2023-03-02
- 发明人: Jinseong HEO , Yunseong LEE , Hyangsook LEE , Sanghyun JO , Seunggeol NAM , Taehwan MOON , Hagyoul BAE , Eunha LEE , Junho LEE
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 优先权: KR10-2021-0112473 20210825
- 主分类号: H01L29/78
- IPC分类号: H01L29/78 ; H01L29/51 ; H01L29/10
摘要:
An electronic device includes: a substrate including a source, a drain, and a channel between the source and the drain; a gate electrode arranged above the substrate and facing the channel, the gate electrode being apart from the channel in a first direction; and a ferroelectric thin film structure between the channel and the gate electrode, the ferroelectric thin film structure including a first ferroelectric layer, a crystallization barrier layer including a dielectric material, and a second ferroelectric layer, which are sequentially arranged from the channel in the first direction. The average of sizes of crystal grains of the first ferroelectric layer may be less than or equal to the average of sizes of crystal grains of the second ferroelectric layer, and owing to small crystal grains, dispersion of performance may be improved.
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