Invention Application
- Patent Title: METHOD FOR MANUFACTURING INDIUM-CONTAINING ORGANIC POLYMER FILM, PATTERNING METHOD, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
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Application No.: US17675770Application Date: 2022-02-18
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Publication No.: US20230086850A1Publication Date: 2023-03-23
- Inventor: Koji ASAKAWA , Norikatsu SASAO , Shinobu SUGIMURA
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Priority: JP2021-153437 20210921
- Main IPC: G03F7/039
- IPC: G03F7/039 ; G03F7/32 ; C08L85/00
Abstract:
A method for manufacturing an indium-containing organic polymer film includes forming an organic polymer film on a base body, infiltrating the organic polymer film with an alkylindium having an alkyl group having 2 to 4 carbon atoms, and oxidizing the organic polymer film infiltrated with the alkylindium.
Information query
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