Invention Application
- Patent Title: APPARATUS AND METHOD FOR TREATING SUBSTRATE
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Application No.: US17952774Application Date: 2022-09-26
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Publication No.: US20230096569A1Publication Date: 2023-03-30
- Inventor: Jun Young CHOI , Gui Su PARK , Young Jin JANG , Jun Hyun LIM
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Cheonan-si
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Cheonan-si
- Priority: KR10-2021-0129103 20210929
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/687 ; B08B3/04 ; B08B13/00 ; B25J11/00

Abstract:
The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a treating bath having an accommodation space for accommodating a treating liquid; a support member configured to support at least one substrate in a vertical posture at the accommodation space; and a posture changing robot configured to change a posture of a substrate immersed in the treating liquid from the vertical posture to a horizontal posture, and wherein the posture changing robot comprises: a body configured to hold the substrate thereon; and a liquid supply member configured to supply a wetting liquid to the substrate placed on the body.
Information query
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