Invention Application
- Patent Title: Structure And Method For Finfet Device With Contact Over Dielectric Gate
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Application No.: US18064785Application Date: 2022-12-12
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Publication No.: US20230115015A1Publication Date: 2023-04-13
- Inventor: Fang Chen , Jhon Jhy Liaw
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L21/321 ; H01L29/45 ; H01L29/40 ; H01L29/417 ; H01L21/8234 ; H01L29/66 ; H01L21/762 ; H01L21/768 ; H01L27/088 ; H01L23/528 ; H01L23/522 ; H01L21/8238 ; H01L27/092

Abstract:
The present disclosure provides one embodiment of a semiconductor structure. The semiconductor structure includes a first active region and a second fin active region extruded from a semiconductor substrate; an isolation featured formed in the semiconductor substrate and being interposed between the first and second fin active regions; a dielectric gate disposed on the isolation feature; a first gate stack disposed on the first fin active region and a second gate stack disposed on the second fin active region; a first source/drain feature formed in the first fin active region and interposed between the first gate stack and the dielectric gate; a second source/drain feature formed in the second fin active region and interposed between the second gate stack and the dielectric gate; a contact feature formed in a first inter-level dielectric material layer and landing on the first and second source/drain features and extending over the dielectric gate.
Information query
IPC分类: