Invention Application
- Patent Title: ANTI FREEZE VALVE APPARATUS AND SEMICONDUCTOR PROCESSING DEVICE INCLUDING THE SAME AND MANUFACTURING METHOD THEREOF
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Application No.: US17973495Application Date: 2022-10-25
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Publication No.: US20230136985A1Publication Date: 2023-05-04
- Inventor: Jin Se PARK , Ki Bong Kim , Myung Seok Cha
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Chungcheongnam-do
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Chungcheongnam-do
- Priority: KR10-2021-0150676 20211104
- Main IPC: F16K31/122
- IPC: F16K31/122
Abstract:
The present disclosure provides a valve apparatus that prevents defects in the valve apparatus and prevents damage to the heat insulating material due to a cryogenic liquid fluid, and a semiconductor processing device including the same and a manufacturing method thereof.
Information query
