Invention Application
- Patent Title: SILICON ETCHING LIQUID CONTAINING AROMATIC ALDEHYDE
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Application No.: US17973953Application Date: 2022-10-26
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Publication No.: US20230136986A1Publication Date: 2023-05-04
- Inventor: Naoto NOMURA , Kosuke NORO , Yoshiki SEIKE , Manami OSHIO , Yuichiro KAWABATA , Seiji TONO
- Applicant: TOKUYAMA CORPORATION
- Applicant Address: JP Yamaguchi
- Assignee: TOKUYAMA CORPORATION
- Current Assignee: TOKUYAMA CORPORATION
- Current Assignee Address: JP Yamaguchi
- Priority: JP2021-176008 20211028
- Main IPC: H01L21/465
- IPC: H01L21/465

Abstract:
An object of the present invention is to provide an etching liquid having a high silicon etch selectivity with respect to silicon-germanium and a high long term stability at a processing temperature, in surface processing during the production of various semiconductor devices, especially various silicon composite semiconductor devices containing silicon-germanium, and the problem is solved by a silicon etching liquid containing an alkaline compound, an aldehyde compound, and water, the aldehyde compound being a water-soluble aromatic aldehyde.
Information query
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