Invention Publication
- Patent Title: SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREFOR
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Application No.: US18258180Application Date: 2021-08-10
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Publication No.: US20240006492A1Publication Date: 2024-01-04
- Inventor: Dong FANG , Kui XIAO
- Applicant: CSMC TECHNOLOGIES FAB2 CO., LTD.
- Applicant Address: CN Wuxi, Jiangsu
- Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
- Current Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
- Current Assignee Address: CN Wuxi, Jiangsu
- Priority: CN 2110340666.1 2021.03.30
- International Application: PCT/CN2021/111841 2021.08.10
- Date entered country: 2023-06-16
- Main IPC: H01L29/10
- IPC: H01L29/10 ; H01L29/417 ; H01L29/78 ; H01L21/265 ; H01L29/66

Abstract:
The present disclosure relates to a semiconductor device and a manufacturing method therefor. The semiconductor device includes: a base, where a first surface of the base is provided with a first trench and a second trench; a gate, provided in the first trench; a gate insulation isolation structure, provided in the first trench, wherein the gate insulation isolation structure covers the gate at a bottom, sides and a top of the gate; a source doped region, provided in the base, on both sides of the first trench and on both sides of the second trench; a trench conductive structure, provided in the second trench; a source electrode, provided on the trench conductive structure and the source doped region, and electrically connected to the trench conductive structure and the source doped region; and a drain electrode, provided on a second surface of the base. The semiconductor device in the present disclosure, in addition to be conducted through a channel, can also be conducted through the trench conductive structure; thus, conductivity thereof is stronger. Since the channel conducts faster, a turn-on voltage (forward voltage drop) thereof is lower.
Information query
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