Invention Publication
- Patent Title: MEMORY ARRAYS WITH BACKSIDE COMPONENTS AND ANGLED TRANSISTORS
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Application No.: US18325492Application Date: 2023-05-30
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Publication No.: US20240008255A1Publication Date: 2024-01-04
- Inventor: Abhishek A. Sharma , Sagar Suthram , Tahir Ghani , Anand S. Murthy , Cory E. Weber , Rishabh Mehandru , Wilfred Gomes , Pushkar Sharad Ranade
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Main IPC: H10B12/00
- IPC: H10B12/00

Abstract:
Memory arrays with backside components and angled transistors, and related assemblies and methods, are disclosed herein. A transistor is referred to as an “angled transistor” if a longitudinal axis of an elongated semiconductor structure of the transistor (e.g., a fin or a nanoribbon) is neither perpendicular nor parallel to any edges of front or back sides of a support structure (e.g., a die) over which the transistor is implemented. A component is referred to as a “backside component” if it is provided on the side of a semiconductor substrate that is opposite to the side over which the transistors of the memory arrays are provided. Memory arrays with backside components and angled transistors provide a promising way to increasing densities of memory cells on the limited real estate of semiconductor chips and/or decreasing adverse effects associated with continuous scaling of IC components.
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