Invention Publication
- Patent Title: SELF-ALIGNED BOTTOM SPACER
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Application No.: US17810652Application Date: 2022-07-05
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Publication No.: US20240014208A1Publication Date: 2024-01-11
- Inventor: Ruilong Xie , Hemanth Jagannathan , Jay William Strane , Kangguo Cheng
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY ARMONK
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY ARMONK
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L29/06 ; H01L29/423 ; H01L21/8234 ; H01L29/66

Abstract:
Embodiments of present invention provide a method of forming a transistor structure. The method includes forming a set of vertical fins on top of a substrate; forming a conformal spacer lining the set of vertical fins and the substrate; forming sidewall spacers next to vertical portions of the conformal spacer; removing portions of the conformal spacer on top of the substrate and between the sidewall spacers; indenting the conformal spacer vertically between the sidewall spacers and the substrate to create openings; forming bottom spacers in the openings; and forming a shallow-trench-isolation (STI) structure between the bottom spacers. A structure formed thereby is also provided.
Information query
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