Invention Publication
- Patent Title: THREE-DIMENSIONAL MEMORY DEVICE INCLUDING VARIABLE THICKNESS SEMICONDUCTOR CHANNELS AND METHOD OF FORMING THE SAME
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Application No.: US17811145Application Date: 2022-07-07
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Publication No.: US20240015963A1Publication Date: 2024-01-11
- Inventor: Tadashi NAKAMURA , Nobuyuki FUJIMURA
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX ADDISON
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX ADDISON
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/11556

Abstract:
A semiconductor structure includes an alternating stack of insulating layers and electrically conductive layers, where the electrically conductive layers include word line electrically conductive layers and a first select-level electrically conductive layer, a memory opening vertically extending through the alternating stack, and a memory opening fill structure located in the memory opening and including a memory film and a vertical semiconductor channel. A vertical cross-sectional profile of an outer sidewall of the vertical semiconductor channel is straight throughout the word line electrically conductive layers and contains a lateral protrusion at a level of the first select-level electrically conductive layer.
Information query
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