Invention Publication
- Patent Title: NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME
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Application No.: US18479871Application Date: 2023-10-03
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Publication No.: US20240030040A1Publication Date: 2024-01-25
- Inventor: Takeshi SONEHARA , Takahiro HIRAI , Masaaki HIGUCHI , Takashi SHIMIZU
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- The original application number of the division: US17183599 2021.02.24
- Main IPC: H01L21/321
- IPC: H01L21/321 ; H10B43/27

Abstract:
According to an embodiment, a nonvolatile semiconductor memory device comprises a plurality of conductive layers that are stacked in plurality in a first direction via an inter-layer insulating layer, that extend in a second direction which intersects the first direction, and that are disposed in plurality in a third direction which intersects the first direction and the second direction. In addition, the same nonvolatile semiconductor memory device comprises: a semiconductor layer that has the first direction as a longitudinal direction; a tunnel insulating layer that contacts a side surface of the semiconductor layer; a charge accumulation layer that contacts a side surface of the tunnel insulating layer; and a block insulating layer that contacts a side surface of the charge accumulation layer. Furthermore, in the same nonvolatile semiconductor memory device, an end in the third direction of the plurality of conductive layers is rounded.
Public/Granted literature
- US12142486B2 Nonvolatile semiconductor memory device and method of manufacturing the same Public/Granted day:2024-11-12
Information query
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