Invention Publication
- Patent Title: METHODS OF FORMING THE MICROELECTRONIC DEVICES, AND RELATED MICROELECTONIC DEVICES AND ELECTRONIC SYSTEMS
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Application No.: US17815359Application Date: 2022-07-27
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Publication No.: US20240038588A1Publication Date: 2024-02-01
- Inventor: Terrence B. McDaniel , Vinay Nair , Russell A. Benson , Christopher W. Petz , Si-Woo Lee , Silvia Borsari , Ping Chieh Chiang , Luca Fumagalli
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L27/108

Abstract:
A method of forming a microelectronic device comprises forming interlayer dielectric material over a base structure comprising semiconductive structures separated from one another by insulative structures. Sacrificial line structures separated from one another by trenches are formed over the interlayer dielectric material. The sacrificial line structures horizontally overlap some of the semiconductive structures, and the trenches horizontally overlap some other of the semiconductive structures. Plug structures are formed within horizontal areas of the trenches and extend through the interlayer dielectric material and into the some other of the semiconductive structures. The sacrificial line structures are replaced with additional trenches. Conductive contact structures are formed within horizontal areas of the additional trenches and extend through the interlayer dielectric material and into the some of the semiconductive structures. Conductive line structures are formed within the additional trenches and in contact with the conductive contact structures.
Information query
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