Invention Publication
- Patent Title: FERROMAGNETIC PLATES FOR ENHANCING INDUCTANCE AND METHODS OF FORMING THE SAME
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Application No.: US17882670Application Date: 2022-08-08
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Publication No.: US20240047508A1Publication Date: 2024-02-08
- Inventor: Yu-Sheng Chen , Hsien Jung Chen , Kuen-Yi Chen , Chien Hung Liu , Yi Ching Ong , Yu-Jen Wang , Kuo-Ching Huang , Harry-Hak-Lay Chuang
- Applicant: Taiwan Semiconductor Manufacturing Company Limited
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee Address: TW Hsinchu
- Main IPC: H01L49/02
- IPC: H01L49/02

Abstract:
A semiconductor structure includes an inductive metal line located in a dielectric material layer that overlies a semiconductor substrate and laterally encloses a first area; and an array of first ferromagnetic plates including a first ferromagnetic material and overlying or underlying the inductive metal line. For any first point that is selected within volumes of the first ferromagnetic plates, a respective second point exists within a horizontal surface of the inductive metal line such that a line connecting the first point and the second point is vertical or has a respective first taper angle that is less than 20 degrees with respective to a vertical direction. The magnetic field passing through the first ferromagnetic plates is applied generally along a hard direction of magnetization and the hysteresis effect is minimized.
Information query
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