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公开(公告)号：US20240047508A1
公开(公告)日：2024-02-08
申请号：US17882670
申请日：2022-08-08
Inventor： Yu-Sheng Chen , Hsien Jung Chen , Kuen-Yi Chen , Chien Hung Liu , Yi Ching Ong , Yu-Jen Wang , Kuo-Ching Huang , Harry-Hak-Lay Chuang
IPC: H01L49/02
CPC classification number: H01L28/10
Abstract: A semiconductor structure includes an inductive metal line located in a dielectric material layer that overlies a semiconductor substrate and laterally encloses a first area; and an array of first ferromagnetic plates including a first ferromagnetic material and overlying or underlying the inductive metal line. For any first point that is selected within volumes of the first ferromagnetic plates, a respective second point exists within a horizontal surface of the inductive metal line such that a line connecting the first point and the second point is vertical or has a respective first taper angle that is less than 20 degrees with respective to a vertical direction. The magnetic field passing through the first ferromagnetic plates is applied generally along a hard direction of magnetization and the hysteresis effect is minimized.
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Patent Agency Ranking
公开(公告)号：US09425228B2
公开(公告)日：2016-08-23
申请号：US14100598
申请日：2013-12-09
Inventor： Shyh-Fann Ting , Ching-Chun Wang , Wei Chuang Wu , Yu-Jen Wang , Chun-Ming Su , Jhy-Jyi Sze , Chen-Jong Wang
IPC: H01L27/146
CPC classification number: H01L27/14645 , H01L27/14621 , H01L27/14625 , H01L27/14627 , H01L27/14629 , H01L27/1463 , H01L27/14643 , H01L27/14685
Abstract: Among other things, one or more image sensors and techniques for forming image sensors are provided. An image sensor comprises a photodiode array configured to detect light. The image sensor comprises an oxide grid comprising a first oxide grid portion and a second oxide grid portion. A metal grid is formed between the first oxide grid portion and the second oxide grid portion. The oxide grid and the metal grid define a filler grid. The filler grid comprises a filler grid portion, such as a color filter, that allows light to propagate through the filler gird portion to an underlying photodiode. The oxide grid and the metal grid confine or channel the light within the filler gird portion. The oxide grid and the metal grid are formed such that the filler grid provides a relatively shorter propagation path for the light, which improves light detection performance of the image sensor.
Abstract translation: 除此之外，还提供了一种或多种用于形成图像传感器的图像传感器和技术。 图像传感器包括被配置为检测光的光电二极管阵列。 图像传感器包括氧化物栅格，其包括第一氧化物栅格部分和第二氧化物栅格部分。 在第一氧化物栅格部分和第二氧化物栅格部分之间形成金属栅格。 氧化物网格和金属网格定义了填充网格。 填充格栅包括填充栅格部分，例如滤色器，其允许光通过填充物壁部分传播到下面的光电二极管。 氧化物网格和金属栅格限制或引导填料壁部分内的光。 氧化物栅格和金属栅格形成为使得填充栅格为光提供相对较短的传播路径，这改善了图像传感器的光检测性能。
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公开(公告)号：US09917130B2
公开(公告)日：2018-03-13
申请号：US15244355
申请日：2016-08-23
Inventor： Shyh-Fann Ting , Ching-Chun Wang , Chen-Jong Wang , Jhy-Jyi Sze , Chun-Ming Su , Wei Chuang Wu , Yu-Jen Wang
IPC: H01L27/146
CPC classification number: H01L27/14645 , H01L27/14621 , H01L27/14625 , H01L27/14627 , H01L27/14629 , H01L27/1463 , H01L27/14643 , H01L27/14685
Abstract: Among other things, one or more image sensors and techniques for forming image sensors are provided. An image sensor comprises a photodiode array configured to detect light. The image sensor comprises an oxide grid comprising a first oxide grid portion and a second oxide grid portion. A metal grid is formed between the first oxide grid portion and the second oxide grid portion. The oxide grid and the metal grid define a filler grid. The filler grid comprises a filler grid portion, such as a color filter, that allows light to propagate through the filler grid portion to an underlying photodiode. The oxide grid and the metal grid confine or channel the light within the filler grid portion. The oxide grid and the metal grid are formed such that the filler grid provides a relatively shorter propagation path for the light, which improves light detection performance of the image sensor.
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公开(公告)号：US20150155322A1
公开(公告)日：2015-06-04
申请号：US14100598
申请日：2013-12-09
Inventor： Shyh-Fann Ting , Ching-Chun Wang , Wei Chuang Wu , Yu-Jen Wang , Chun-Ming Su , Jhy-Jyi Sze , Chen-Jong Wang
IPC: H01L27/146
CPC classification number: H01L27/14645 , H01L27/14621 , H01L27/14625 , H01L27/14627 , H01L27/14629 , H01L27/1463 , H01L27/14643 , H01L27/14685
Abstract: Among other things, one or more image sensors and techniques for forming image sensors are provided. An image sensor comprises a photodiode array configured to detect light. The image sensor comprises an oxide grid comprising a first oxide grid portion and a second oxide grid portion. A metal grid is formed between the first oxide grid portion and the second oxide grid portion. The oxide grid and the metal grid define a filler grid. The filler grid comprises a filler grid portion, such as a color filter, that allows light to propagate through the filler gird portion to an underlying photodiode. The oxide grid and the metal grid confine or channel the light within the filler gird portion. The oxide grid and the metal grid are formed such that the filler grid provides a relatively shorter propagation path for the light, which improves light detection performance of the image sensor.
Abstract translation: 除此之外，还提供了一种或多种用于形成图像传感器的图像传感器和技术。 图像传感器包括被配置为检测光的光电二极管阵列。 图像传感器包括氧化物栅格，其包括第一氧化物栅格部分和第二氧化物栅格部分。 在第一氧化物栅格部分和第二氧化物栅格部分之间形成金属栅格。 氧化物网格和金属网格定义了填充网格。 填充格栅包括填充栅格部分，例如滤色器，其允许光通过填充物壁部分传播到下面的光电二极管。 氧化物网格和金属栅格限制或引导填料壁部分内的光。 氧化物栅格和金属栅格形成为使得填充栅格为光提供相对较短的传播路径，这改善了图像传感器的光检测性能。
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公开(公告)号：US10269858B2
公开(公告)日：2019-04-23
申请号：US15915368
申请日：2018-03-08
Inventor： Shyh-Fann Ting , Ching-Chun Wang , Chen-Jong Wang , Jhy-Jyi Sze , Chun-Ming Su , Wei Chuang Wu , Yu-Jen Wang
IPC: H01L27/146
Abstract: Among other things, one or more image sensors and techniques for forming image sensors are provided. An image sensor comprises a photodiode array configured to detect light. The image sensor comprises an oxide grid comprising a first oxide grid portion and a second oxide grid portion. A metal grid is formed between the first oxide grid portion and the second oxide grid portion. The oxide grid and the metal grid define a filler grid. The filler grid comprises a filler grid portion, such as a color filter, that allows light to propagate through the filler grid portion to an underlying photodiode. The oxide grid and the metal grid confine or channel the light within the filler grid portion. The oxide grid and the metal grid are formed such that the filler grid provides a relatively shorter propagation path for the light, which improves light detection performance of the image sensor.
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公开(公告)号：US20160358970A1
公开(公告)日：2016-12-08
申请号：US15244355
申请日：2016-08-23
Inventor： Shyh-Fann Ting , Ching-Chun Wang , Chen-Jong Wang , Jhy-Jyi Sze , Chun-Ming Su , Wei Chuang Wu , Yu-Jen Wang
IPC: H01L27/146
CPC classification number: H01L27/14645 , H01L27/14621 , H01L27/14625 , H01L27/14627 , H01L27/14629 , H01L27/1463 , H01L27/14643 , H01L27/14685
Abstract: Among other things, one or more image sensors and techniques for forming image sensors are provided. An image sensor comprises a photodiode array configured to detect light. The image sensor comprises an oxide grid comprising a first oxide grid portion and a second oxide grid portion. A metal grid is formed between the first oxide grid portion and the second oxide grid portion. The oxide grid and the metal grid define a filler grid. The filler grid comprises a filler grid portion, such as a color filter, that allows light to propagate through the filler grid portion to an underlying photodiode. The oxide grid and the metal grid confine or channel the light within the filler grid portion. The oxide grid and the metal grid are formed such that the filler grid provides a relatively shorter propagation path for the light, which improves light detection performance of the image sensor.
Abstract translation: 除此之外，还提供了一种或多种用于形成图像传感器的图像传感器和技术。 图像传感器包括被配置为检测光的光电二极管阵列。 图像传感器包括氧化物栅格，其包括第一氧化物栅格部分和第二氧化物栅格部分。 在第一氧化物栅格部分和第二氧化物栅格部分之间形成金属栅格。 氧化物网格和金属网格定义了填充网格。 填充格栅包括填充栅格部分，例如滤色器，其允许光通过填充栅格部分传播到下面的光电二极管。 氧化物栅格和金属栅格限制或引导光在填充栅格部分内。 氧化物栅格和金属栅格形成为使得填充栅格为光提供相对较短的传播路径，这改善了图像传感器的光检测性能。
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