Methods, apparatus, systems and articles of manufacture (e.g., physical storage media) to implement software defined silicon feature configuration pay-as-you-go licensing are disclosed. A disclosed silicon semiconductor device includes a first counter that increments a first count when a timer expires and, responsive to expiration of the timer, a feature configuration sampler to sample a state of a configuration of a feature of the silicon semiconductor device. In addition, the silicon semiconductor device includes a second counter that increments a second count when the sampled state of the configuration of the feature indicates the feature is active. A feature up-time tracker is also included outputs a value representative of an amount of time the configuration has been active, where the amount of time is based on the first count and the second count.