Invention Publication
- Patent Title: PNEUMATIC CONTROLLED FLEXURE SYSTEM FOR STABILIZING A PROJECTION DEVICE
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Application No.: US18261150Application Date: 2022-02-01
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Publication No.: US20240069452A1Publication Date: 2024-02-29
- Inventor: Assaf KIDRON , Jiawei SHI , Liang-Yuh CHEN , Che-Kai CHANG , Tsu-Hui YANG , Nimrod SMITH , Grant WANG , Preston FUNG , Vasuman Ghanapaati SRIRANGARAJAN , Davidi KALIR , Rudolf C. BRUNNER
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Priority: IN 2141004605 2021.02.03
- International Application: PCT/US2022/014690 2022.02.01
- Date entered country: 2023-07-12
- Main IPC: G03F7/00
- IPC: G03F7/00

Abstract:
Embodiments of the present disclosure relate to projection stabilization systems and maskless lithography systems having projection stabilization systems. The projection stabilization system compensates for propagating vibrations that move image projection systems (IRS's). The IRS's are in a processing positon prior to operation of the maskless lithography process. One or more stiffeners are coupled to the IPS. The one or more stiffeners apply pressure to flexures coupled to each stiffener. The flexures are coupled to the IPS to provide stabilization to the IPS during the operations of the maskless lithography process. For example, the one or more of stiffeners protect the IPS from vibrations that propagate through the system during operation.
Public/Granted literature
- US2662926A Pentamethylbenzene disproportionation Public/Granted day:1953-12-15
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