公开(公告)号：US20240069452A1

公开(公告)日：2024-02-29

申请号：US18261150

申请日：2022-02-01

Applicant: Applied Materials, Inc.

Inventor： Assaf KIDRON ,  Jiawei SHI ,  Liang-Yuh CHEN ,  Che-Kai CHANG ,  Tsu-Hui YANG ,  Nimrod SMITH ,  Grant WANG ,  Preston FUNG ,  Vasuman Ghanapaati SRIRANGARAJAN ,  Davidi KALIR ,  Rudolf C. BRUNNER

IPC: G03F7/00

CPC classification number: G03F7/70833 ,  G03F7/70275 ,  G03F7/709

Abstract: Embodiments of the present disclosure relate to projection stabilization systems and maskless lithography systems having projection stabilization systems. The projection stabilization system compensates for propagating vibrations that move image projection systems (IRS's). The IRS's are in a processing positon prior to operation of the maskless lithography process. One or more stiffeners are coupled to the IPS. The one or more stiffeners apply pressure to flexures coupled to each stiffener. The flexures are coupled to the IPS to provide stabilization to the IPS during the operations of the maskless lithography process. For example, the one or more of stiffeners protect the IPS from vibrations that propagate through the system during operation.

公开(公告)号：US20250100105A1

公开(公告)日：2025-03-27

申请号：US18373657

申请日：2023-09-27

Applicant: Applied Materials, Inc.

Inventor： Michael Prestoza DECENA ,  Tsu-Hui YANG ,  Sridhar K. N. ,  Parthiban BALAKRISHNAN ,  Yuan LING ,  Sylvia SUN ,  Simpson WEN ,  Chih An CHANG ,  Tk WANG ,  Chao-Jian HUANG

IPC: B24B41/06 ,  B24B37/30

Abstract: The disclosure provides an apparatus for substrate polishing, the apparatus includes a housing member, a carrier member, and a distal force assembly. The carrier member is coupled to and disposed radially outward of the housing member. The distal force assembly disposed radially inward of an exterior portion of the carrier member and radially outward of the housing member. The distal force assembly includes a bladder seal, a seal ring in contact with the bladder seal. The seal ring has a seal ring face and one or more grooves disposed therein. The grooves include a plateau radius and a ridge radius disposed opposite the plateau radius at an intersection between the seal ring face and the grooves, wherein the plateau radius and the ridge radius are between about 0.012 to about 0.018 inches. The distal force assembly also includes a transfer ring coupled to the seal ring opposite the bladder.