- 专利标题: INKJET HEAD UNIT AND SUBSTRATE TREATMENT APPARATUS INCLUDING THE SAME
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申请号: US18225668申请日: 2023-07-24
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公开(公告)号: US20240075740A1公开(公告)日: 2024-03-07
- 发明人: Jang Mi WOO , Jin Hyuck Yang , Yong Kyu Cho , Cheon Su Cho , Ki Hoon Choi
- 申请人: SEMES CO., LTD.
- 申请人地址: KR Chungcheongnam-do
- 专利权人: SEMES CO., LTD.
- 当前专利权人: SEMES CO., LTD.
- 当前专利权人地址: KR Chungcheongnam-do
- 优先权: KR 20220112661 2022.09.06
- 主分类号: B41J2/14
- IPC分类号: B41J2/14 ; B41J2/045
摘要:
An inkjet head unit capable of performing high-resolution pixel printing on a large-size substrate and a substrate treatment apparatus including the inkjet head unit are provided. The substrate treatment apparatus includes: a processing unit supporting and moving a substrate; an inkjet head unit performing pixel printing on the substrate; and a gantry unit moving the inkjet head unit over the substrate, wherein the inkjet head unit includes head packs, which include a plurality of nozzles ejecting a substrate treatment liquid onto the substrate, and a head base, in which the head packs are installed and the head packs are disposed in a single row in the head base.
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