发明公开
- 专利标题: POLISHING APPARATUS
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申请号: US18521813申请日: 2023-11-28
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公开(公告)号: US20240091899A1公开(公告)日: 2024-03-21
- 发明人: Kenichi KOBAYASHI , Masayuki NAKANISHI , Makoto KASHIWAGI , Manao HOSHINA
- 申请人: EBARA CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: EBARA CORPORATION
- 当前专利权人: EBARA CORPORATION
- 当前专利权人地址: JP Tokyo
- 优先权: JP 17206648 2017.10.25
- 分案原申请号: US16163070 2018.10.17
- 主分类号: B24B37/04
- IPC分类号: B24B37/04 ; B24B7/22 ; B24B21/00 ; B24B21/10 ; B24B37/005 ; B24B37/10 ; B24B37/30 ; B24B41/06 ; H01L21/02 ; H01L21/67 ; H01L21/687
摘要:
A polishing apparatus which can efficiently polish an entirety of a back surface of a substrate, with the back surface facing downward, is disclosed. The polishing apparatus includes: a substrate holder configured to rotate the substrate; a polishing head configured to polish the back surface of the substrate; a tape advancing device; and a translational rotating mechanism configured to cause the polishing head to make a translational rotating motion. The substrate holder includes a plurality of rollers which are rotatable about their own axes. The plurality of rollers have substrate-holding surfaces capable of contacting a periphery of the substrate. The polishing head is disposed below the substrate-holding surfaces. The polishing head includes a polishing blade configured to press the polishing tape against the back surface of the substrate, and a pressing mechanism configured to push the polishing blade upward.
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