- 专利标题: DRY FILM LAMINATION WITH DYNAMIC FEEDBACK CONTROL
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申请号: US17949276申请日: 2022-09-21
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公开(公告)号: US20240092074A1公开(公告)日: 2024-03-21
- 发明人: Joshua STACEY , Yosef KORNBLUTH , Whitney BRYKS
- 申请人: Intel Corporation
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 主分类号: B32B41/00
- IPC分类号: B32B41/00 ; B32B37/06 ; B32B37/08 ; B32B37/10 ; H01L21/48
摘要:
The present disclosure is directed to a position-controlled lamination tool or press that includes an array or plurality of pressure sensors and an array or plurality of heating/cooling elements or components, which may be coupled together, for preventing or reducing laminating film or material bleed out and improving thickness variation performance. The pressure sensors may provide a controller, which is coupled to the lamination tool, with real-time feedback on any thickness variations across a substrate panel and the controller may adjust the temperature output of the heating and cooling elements to locally modify the viscosity of the laminating material in one or more regions of the substrate panel to either decrease or increase the flowability of the laminating material.
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