Invention Publication
- Patent Title: Shielded Probes for Semiconductor Testing, Methods for Using, and Methods for Making
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Application No.: US17493802Application Date: 2021-10-04
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Publication No.: US20240094252A1Publication Date: 2024-03-21
- Inventor: Jia Li , Arun S. Veeramani , Stefano Felici , Dennis R. Smalley
- Applicant: Microfabrica Inc.
- Applicant Address: US CA Van Nuys
- Assignee: Microfabrica Inc.
- Current Assignee: Microfabrica Inc.
- Current Assignee Address: US CA Van Nuys
- Main IPC: G01R1/067
- IPC: G01R1/067 ; G01R3/00
Abstract:
Dual shield probes are provided having one or more of a plurality of different features including: discontinuous dielectric spacers, fixed nodes, sliding nodes, shield nodes, bridges, stops, interlocked dielectric and conductive elements, along with methods of using and making such probes.
Information query
