Invention Publication
- Patent Title: PERIMETER FRAME FOR SPACING RETICLE PODS
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Application No.: US18370570Application Date: 2023-09-20
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Publication No.: US20240096670A1Publication Date: 2024-03-21
- Inventor: Brian Wiseman , Russ V. Raschke , Paul J. Magoon , Huaping Wang
- Applicant: ENTEGRIS, INC.
- Applicant Address: US MA Billerica
- Assignee: ENTEGRIS, INC.
- Current Assignee: ENTEGRIS, INC.
- Current Assignee Address: US MA Billerica
- Main IPC: H01L21/673
- IPC: H01L21/673

Abstract:
A spacer for parts of a reticle pod includes spacer contacts configured to contact alignment features of a cover and a baseplate of the reticle pod such that the cover and baseplate are separated by a gap. The spacer includes a frame connecting at least two of the spacer contacts. The frame can include a spring arm allowing deformation such that the spacer contacts can be moved relative to one another to facilitate interfacing with the alignment features. The spacer contacts can be configured to surround pins included in the alignment features. The spacer contacts can be configured to be inserted into lead-in portions of channels included in the alignment features.
Information query
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