公开(公告)号：US12140860B2

公开(公告)日：2024-11-12

申请号：US17066358

申请日：2020-10-08

Applicant: ENTEGRIS, INC.

Inventor： Shawn D. Eggum ,  Anthony M. Tieben ,  Brian Wiseman ,  Russ V. Raschke ,  Huaping Wang

IPC: G03F1/66 ,  B65D85/48 ,  H01L21/673

Abstract: A door of a reticle pod includes a window having a lens, sidewall, and a ledge. The window may be positioned or affixed internally in a door between the housing and a cover. A compressive seal may be used in conjunction with the window. The sidewalls, the ledge and the compressive seal work together to enable a compression fit in the door while maintained the desired level of protection from external contaminants.

公开(公告)号：US20230333463A1

公开(公告)日：2023-10-19

申请号：US18132227

申请日：2023-04-07

Applicant: ENTEGRIS, INC.

Inventor： Huaping Wang ,  Russ V. Raschke ,  Caleb Elwell ,  Matthew Reber ,  Brian Wiseman

IPC: G03F1/66

CPC classification number: G03F1/66

Abstract: Reticle containers include a magnetic latch to close the container and clamp the reticle contained within. The magnetic latch includes at least one magnet and another ferromagnetic material, which can be either another magnet or a magnetically attractable material. At least one of the magnets and the other ferromagnetic material can be manipulated to secure or open the container. The manipulation can include at least one of sliding of a housing, rotation of a magnet, or application of an external magnetic field to change the attraction of the magnet and the other ferromagnetic material.

公开(公告)号：US20220357650A1

公开(公告)日：2022-11-10

申请号：US17738304

申请日：2022-05-06

Applicant: ENTEGRIS, INC.

Inventor： Huaping Wang ,  Russ V. Raschke

IPC: G03F1/66 ,  H01L21/673 ,  C23C18/32

Abstract: This technical disclosure describes a device that includes a recital pod and the method of making and maintaining the pod. The device includes a pod that includes a cover including a cover body; a baseplate including a baseplate body; and one or more mating surfaces formed on one or both of the baseplate body and the cover body to assemble between the cover and the baseplate to each other. The one or more mating surfaces each includes an outermost coating configured to be wear-resistant and lubricating, the outermost coating includes a composite metal plating, and the composite metal plating includes a metal plating with a lubricant embedded therein and/or layered over the metal plating.

公开(公告)号：US20240096670A1

公开(公告)日：2024-03-21

申请号：US18370570

申请日：2023-09-20

Applicant: ENTEGRIS, INC.

Inventor： Brian Wiseman ,  Russ V. Raschke ,  Paul J. Magoon ,  Huaping Wang

IPC: H01L21/673

CPC classification number: H01L21/67359 ,  H01L21/67386

Abstract: A spacer for parts of a reticle pod includes spacer contacts configured to contact alignment features of a cover and a baseplate of the reticle pod such that the cover and baseplate are separated by a gap. The spacer includes a frame connecting at least two of the spacer contacts. The frame can include a spring arm allowing deformation such that the spacer contacts can be moved relative to one another to facilitate interfacing with the alignment features. The spacer contacts can be configured to surround pins included in the alignment features. The spacer contacts can be configured to be inserted into lead-in portions of channels included in the alignment features.

公开(公告)号：US20250102901A1

公开(公告)日：2025-03-27

申请号：US18892069

申请日：2024-09-20

Applicant: ENTEGRIS, INC.

Inventor： Huaping Wang ,  Russ V. Raschke

IPC: G03F1/38 ,  G03F1/66

Abstract: Reticle contacts for use in a reticle container are provided having further features for wear reduction. The wear reduction features include one or more of a ring-shaped projection or one or more elongate arcing projections from a reticle contact region, one or more reliefs such as ring-shaped trenches provided in a reticle contact region, or one or more reliefs provided by having relatively thinner regions of the reticle contact region.

公开(公告)号：USD1066292S1

公开(公告)日：2025-03-11

申请号：US29853454

申请日：2022-09-15

Applicant: ENTEGRIS, INC.

Designer： Brian Wiseman ,  Russ V. Raschke ,  Paul J. Magoon ,  Huaping Wang

公开(公告)号：US20250028239A1

公开(公告)日：2025-01-23

申请号：US18733572

申请日：2024-06-04

Applicant: ENTEGRIS, INC.

Inventor： Huaping Wang ,  Russ V. Raschke ,  Brian Wiseman

IPC: G03F1/66 ,  G03F1/84

Abstract: Described are baseplate devices used to support, transport, and process a reticle, including to support a reticle during a step of detecting particle contamination at a surface of the reticle prior to using the reticle in an extreme ultraviolet (EUV) lithography process.

公开(公告)号：US20220404696A1

公开(公告)日：2022-12-22

申请号：US17842109

申请日：2022-06-16

Applicant: ENTEGRIS, INC.

Inventor： Huaping Wang ,  Eric A. Kirkland ,  Russ V. Raschke

IPC: G03F1/66 ,  H01L21/673

Abstract: An apparatus includes a reticle pod. The reticle pod includes a baseplate having a first surface, a cover having a second surface, and at least one layer. The first surface includes a first mating surface. The second surface includes a second mating surface. The at least one layer is bonded to one or more of at least a part of the first mating surface and at least a part of the second mating surface. The first surface and the second surface overlap at the first mating surface and the second mating surface when the cover is attached to the baseplate.

公开(公告)号：US20250147410A1

公开(公告)日：2025-05-08

申请号：US18942306

申请日：2024-11-08

Applicant: ENTEGRIS, INC.

Inventor： Russ V. Raschke ,  Huaping Wang

IPC: G03F1/66

Abstract: Substrate containers include a deformable surface configured to deflect into an internal space so as to reduce the volume of said internal space when the reticle pod is opened. The deformable surface can be a filter, for example a filter supported by a deformable member, a filter including a deformable member, a filter that is retained under tension in the substrate container, or a filter disposed on a deformable member.

公开(公告)号：US20250108972A1

公开(公告)日：2025-04-03

申请号：US18900607

申请日：2024-09-27

Applicant: ENTEGRIS, INC.

Inventor： Huaping Wang ,  Anthony M. Tieben ,  Russ V. Raschke ,  Brian Wiseman ,  Tyler Monforton

IPC: B65D85/68 ,  B65D25/10 ,  B65D77/04

Abstract: A substrate container is provided including an inner pod configured to accommodate a large format reticle, and an outer pod configured to contain and secure the inner pod. The inner pod can be clamped together using a clip or features provided on the outer pod. Features of the outer pod that can clamp the inner pod include flanges, grooves, angled clamping surfaces, other clamping features, or clamping mechanisms. Clamping mechanisms can be actuated by physical, electrical, and/or magnetic features, such as placement of a door in an opening of a shell, operation of a door latch, or interaction of a tool to release the clamping mechanism using mechanical, electrical, and/or magnetic force.