公开(公告)号：US12140860B2

公开(公告)日：2024-11-12

申请号：US17066358

申请日：2020-10-08

Applicant: ENTEGRIS, INC.

Inventor： Shawn D. Eggum ,  Anthony M. Tieben ,  Brian Wiseman ,  Russ V. Raschke ,  Huaping Wang

IPC: G03F1/66 ,  B65D85/48 ,  H01L21/673

Abstract: A door of a reticle pod includes a window having a lens, sidewall, and a ledge. The window may be positioned or affixed internally in a door between the housing and a cover. A compressive seal may be used in conjunction with the window. The sidewalls, the ledge and the compressive seal work together to enable a compression fit in the door while maintained the desired level of protection from external contaminants.

公开(公告)号：US12062560B2

公开(公告)日：2024-08-13

申请号：US18107325

申请日：2023-02-08

Applicant: ENTEGRIS, INC.

Inventor： Russ V. Raschke ,  Shawn D. Eggum ,  Barry Lee Gregerson

IPC: H01L21/673

CPC classification number: H01L21/67359 ,  H01L21/67369

Abstract: A reticle pod includes an outer pod, an inner pod cover and an inner base plate. A reticle is supported on the base and is contained within the environment created by the inner pod cover and the inner pod base. The inner pod cover can include a plurality of reticle retainers configured to contact a side wall of the reticle and limit movement of the reticle in a horizontal direction.

公开(公告)号：US12013648B2

公开(公告)日：2024-06-18

申请号：US17982176

申请日：2022-11-07

Applicant: ENTEGRIS, INC.

Inventor： Russ V. Raschke ,  Brian Wiseman

IPC: G03F9/00 ,  G03F1/66

CPC classification number: G03F9/7011 ,  G03F1/66

Abstract: Reticle pods include inner pods where motion limiting features restrict translational motion of the cover and the baseplate relative to one another. The motion limiting features are in addition to gross alignment features included in the inner pod. The motion limiting features resist the translational motion before the gross alignment features would resist the motion. Motion limiting features can include elastic bodies providing friction against contact surfaces, or pins received on elastic contact surfaces or in diaphragms or motion limiting cups.

公开(公告)号：US20240111222A1

公开(公告)日：2024-04-04

申请号：US18375290

申请日：2023-09-29

Applicant: ENTEGRIS, INC.

Inventor： Russ V. Raschke ,  Tyler Monforton

IPC: G03F7/00

CPC classification number: G03F7/70741

Abstract: An apparatus includes an inner container having a baseplate and a cover, an outer container having a pod dome and a pod door, and a first set of pins and a second set of pins disposed on the pod door. The pod door has a locked state and an unlocked state. The first set of pins and the second set of pins are configured to support the baseplate. When the pod door is in the unlocked state and the first set of pins contacts the baseplate, a clearance is formed between the second set of pins and the baseplate. When the pod door is in the locked state, the first set of pins and the second set of pins contact the baseplate.

公开(公告)号：US20230187246A1

公开(公告)日：2023-06-15

申请号：US18107325

申请日：2023-02-08

Applicant: ENTEGRIS, INC.

Inventor： Russ V. Raschke ,  Shawn D. Eggum ,  Barry Lee Gregerson

IPC: H01L21/673

CPC classification number: H01L21/67359 ,  H01L21/67369

Abstract: A reticle pod includes an outer pod, an inner pod cover and an inner base plate. A reticle is supported on the base and is contained within the environment created by the inner pod cover and the inner pod base. The inner pod cover can include a plurality of reticle retainers configured to contact a side wall of the reticle and limit movement of the reticle in a horizontal direction.

公开(公告)号：US20240302757A1

公开(公告)日：2024-09-12

申请号：US18665285

申请日：2024-05-15

Applicant: ENTEGRIS, INC.

Inventor： Russ V. Raschke ,  Brian Wiseman

IPC: G03F9/00 ,  G03F1/66

CPC classification number: G03F9/7011 ,  G03F1/66

Abstract: Reticle pods include inner pods where motion limiting features restrict translational motion of the cover and the baseplate relative to one another. The motion limiting features are in addition to gross alignment features included in the inner pod. The motion limiting features resist the translational motion before the gross alignment features would resist the motion. Motion limiting features can include elastic bodies providing friction against contact surfaces, or pins received on elastic contact surfaces or in diaphragms or motion limiting cups.

公开(公告)号：US20240096670A1

公开(公告)日：2024-03-21

申请号：US18370570

申请日：2023-09-20

Applicant: ENTEGRIS, INC.

Inventor： Brian Wiseman ,  Russ V. Raschke ,  Paul J. Magoon ,  Huaping Wang

IPC: H01L21/673

CPC classification number: H01L21/67359 ,  H01L21/67386

Abstract: A spacer for parts of a reticle pod includes spacer contacts configured to contact alignment features of a cover and a baseplate of the reticle pod such that the cover and baseplate are separated by a gap. The spacer includes a frame connecting at least two of the spacer contacts. The frame can include a spring arm allowing deformation such that the spacer contacts can be moved relative to one another to facilitate interfacing with the alignment features. The spacer contacts can be configured to surround pins included in the alignment features. The spacer contacts can be configured to be inserted into lead-in portions of channels included in the alignment features.

公开(公告)号：US11914287B2

公开(公告)日：2024-02-27

申请号：US16631121

申请日：2018-07-16

Applicant: ENTEGRIS, INC.

Inventor： Russ V. Raschke ,  Shawn D. Eggum

IPC: G03F1/66 ,  H01L21/673

CPC classification number: G03F1/66 ,  H01L21/67359 ,  H01L21/67376 ,  H01L21/67386

Abstract: A pod for transporting reticles includes an inner cover and an inner base plate. The inner base plate cooperates with the cover to establish a space for mounting a reticle. The inner base plate includes a hole having a perimeter and first and second flanges extending inward from the perimeter. A window assembly is mounted in the hole. The window assembly includes a transparent plate, a seal and a retainer. The seal contacts the outer or side planar surface of the transparent plate and the perimeter of the hole to seal an interface between the window assembly and the hole. The retainer contacts the second flange to retain the seal and transparent plate within the hole.

公开(公告)号：US20230194978A1

公开(公告)日：2023-06-22

申请号：US18080035

申请日：2022-12-13

Applicant: ENTEGRIS, INC.

Inventor： Russ V. Raschke

IPC: G03F1/66

CPC classification number: G03F1/66

Abstract: Reticle pod inner pods include a cover and a baseplate, with the cover and the baseplate contacting one another at contact surfaces. The contact surfaces of the cover and the baseplate each include different materials. The different materials can each be metals. The different materials can differ in hardness. The difference in hardness can be 50 Brinell hardness or greater. One of the different materials can be a ductile material, having elongation at break of 25% or greater. Methods can include providing the cover and the baseplate each including a first material, and providing a second, different material at the contact surfaces of one of the cover or the baseplate.

公开(公告)号：US20230148165A1

公开(公告)日：2023-05-11

申请号：US17982176

申请日：2022-11-07

Applicant: ENTEGRIS, INC.

Inventor： Russ V. Raschke ,  Brian Wiseman

IPC: G03F9/00 ,  G03F1/66

CPC classification number: G03F9/7011 ,  G03F1/66

Abstract: Reticle pods include inner pods where motion limiting features restrict translational motion of the cover and the baseplate relative to one another. The motion limiting features are in addition to gross alignment features included in the inner pod. The motion limiting features resist the translational motion before the gross alignment features would resist the motion. Motion limiting features can include elastic bodies providing friction against contact surfaces, or pins received on elastic contact surfaces or in diaphragms or motion limiting cups.