Invention Publication
- Patent Title: INTEGRATED CIRCUIT STRUCTURES HAVING UNIFORM GRID METAL GATE AND TRENCH CONTACT PLUG
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Application No.: US17954206Application Date: 2022-09-27
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Publication No.: US20240105716A1Publication Date: 2024-03-28
- Inventor: Leonard P. GULER , Sukru YEMENICIOGLU , Mohit K. HARAN , Stephen M. CEA , Charles H. WALLACE , Tahir GHANI , Shengsi LIU , Saurabh ACHARYA , Thomas O'BRIEN , Nidhi KHANDELWAL , Marie T. CONTE , Prabhjot LUTHRA
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L21/8234

Abstract:
Integrated circuit structures having uniform grid metal gate and trench contact cut, and methods of fabricating integrated circuit structures having uniform grid metal gate and trench contact cut, are described. For example, an integrated circuit structure includes a vertical stack of horizontal nanowires. A gate electrode is over the vertical stack of horizontal nanowires. A conductive trench contact is adjacent to the gate electrode. A dielectric sidewall spacer is between the gate electrode and the conductive trench contact. A first dielectric cut plug structure extends through the gate electrode, through the dielectric sidewall spacer, and through the conductive trench contact. A second dielectric cut plug structure extends through the gate electrode, through the dielectric sidewall spacer, and through the conductive trench contact, the second dielectric cut plug structure laterally spaced apart from and parallel with the first dielectric cut plug structure.
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